An inline system measuring 3D geometry and surface data.

D · METROLOGY

Inspection & Metrology

Quantify surface, geometry, thickness and thermal conditions while preserving metrology traceability.

01

PROBLEM

Factory challenge

Pass/fail results are separated from calibration, uncertainty, MSA and process context.

02

APPROACH

OPTO approach

Combine 3D, web gauge, spectral and thermal measurement with QualityOS.

PERFORMANCE · target metrics

1µm Repeatability Calibration · MSA
100% Inline full coverage At production speed
3D Surface · shape Point-cloud reconstruction
MSA Traceability Uncertainty managed

※ Figures are planning assumptions, agreed per sample and site conditions via PoC gates.

Metrology Pipeline

From scan to process feedback — AI judges, metrology stays traceable

3D/HSI scans reconstruct surfaces and AI classifies defects, but verdicts run on measurements backed by calibration and uncertainty.

  1. 01 · SCAN

    3D · HSI scan

    High-resolution scanning via laser, structured light and hyperspectral.

  2. 02 · RECONSTRUCT

    Reconstruct (cloud)

    Precisely reconstruct geometry from point clouds and surface models.

  3. 03 · MEASURE

    Measure

    Quantify dimensions, steps, burrs, warp and foreign matter.

  4. 04 · JUDGE

    Judge (tolerance · SPC)

    Combine AI defect classification with tolerances and SPC.

  5. 05 · FEEDBACK

    Process feedback

    Recirculate lot tracking and process-improvement data via QualityOS.

SOLUTIONS

Representative solutions

Quality data connecting calibration, recipes, SPC and lots

Precision inspection equipment measuring 3D geometry on a production line
MetrologyP0 · concept validation

SurfaceMetrix 3D

Inline 3D surface, shape and dimensional metrology

Measures steps, burrs, beads, warpage and surface geometry at production speed with explicit calibration and measurement-system criteria.

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Inline metrology equipment on a roll-to-roll film production line
MetrologyConcept · validation required

WebGauge Fusion

Fused cross-web metrology for films and electrodes

Synchronizes thickness, width, surface and thermal data on continuous materials to trace process variation and defect position by lot.

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An operations display showing measurement graphs and quality data from inspection equipment
MetrologyP0 · concept validation

QualityOS

Recipe, calibration, model, SPC and lot traceability

Organizes inspection and metrology results, recipes, calibration, models and lot history in a common quality data structure.

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Why our Metrology

AI verdicts separated from metrology traceability

AI accelerates defect classification but never replaces measurement traceability, calibration or uncertainty. Only on verified measurement do AI verdicts and SPC earn trust.

  • 3D vision reconstruction + AI defect classification
  • Calibration, MSA and uncertainty assured
  • Traceable over/under-detection evidence
  • Process improvement fed back via SPC

Optics & Metrology Stack

Optics & metrology stack

Optics · Sensors
Laser displacementStructured-light 3DHyperspectral (HSI)X-Vision NDT
Vision · AI
3D reconstructionDefect classificationForeign-matter IDSub-pixel measurement
Metrology assurance
CalibrationMSAUncertaintyTraceability
Operations
QualityOSSPCLot trackingRecipe management

PROOF & DELIVERABLES

Verification deliverables that remain

Acceptance is based on the documents, data and procedures needed for approval and operation.

  1. 01Measurement requirements and MSA plan
  2. 02Calibration and validation criteria
  3. 03Recipe and SPC structure
  4. 04Lot traceability data model
  5. 05FAT/SAT measurement report

INTEGRATION

Integration scope

  • 2D/3D cameras
  • Encoders and lighting
  • Thermal and spectral sensors
  • PLC, MES and QMS
  • QualityOS

METROLOGY

Design a verification path for your site

Specifications and performance are agreed through sample and site-specific PoC gates.

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